![]() Tao Gao, Bjørn Petter Jelle, Linn Ingunn C.Environmental Science & Technology 2013, 47 Environmental Life Cycle Assessment of a Carbon Nanotube-Enabled Semiconductor Device. Eckelman, Ali Hakimian, Sivasubramanian Somu, and Jacqueline A. Industrial & Engineering Chemistry Research 2013, 52 Layer-by-Layer Deposition of Titanium Dioxide Nanoparticles on Polymeric Membranes: A Life Cycle Assessment Study. Stefano Zuin, Petra Scanferla, Andrea Brunelli, Antonio Marcomini, John E.Environmental Science & Technology 2014, 48 Life Cycle Impacts and Benefits of a Carbon Nanotube-Enabled Chemical Gas Sensor. Environmental Science & Technology 2015, 49 Energy Impacts of Wide Band Gap Semiconductors in U.S. Upadhyayula, Eric Masanet, and Joe Cresko. Sustainable Life Cycles of Natural-Precursor-Derived Nanocarbons. ACS Sustainable Chemistry & Engineering 2016, 4 A Strategy for Material Supply Chain Sustainability: Enabling a Circular Economy in the Electronics Industry through Green Engineering. ![]() This article is cited by 92 publications. The result is a comprehensive data set and methodology that may be used to estimate and improve the environmental performance of a broad range of electronics and other emerging applications that involve nano and micro fabrication. In addition, we evaluate upstream energy requirements associated with chemicals and materials using both existing process life cycle assessment (LCA) databases and an economic input-output (EIO) model. In this work we develop a library of typical gate-to-gate materials and energy requirements, as well as emissions associated with a complete set of fabrication process models used in manufacturing a modern microprocessor. Furthermore, the fabrication processes used in the semiconductor industry are finding increasing application in other products, such as microelectromechanical systems (MEMS), flat panel displays, and photovoltaics. It is important to understand and reduce the environmental impacts of semiconductor manufacturing because these devices are ubiquitous components in electronics. ![]() The manufacturing of modern semiconductor devices involves a complex set of nanoscale fabrication processes that are energy and resource intensive, and generate significant waste. ![]()
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